Applied Materials Arques Campus Technology Center
Santa Clara, CA
This 167,300sqft technology center is a state-of-the-art microelectronics tool R&D and demonstration facility. It includes 60,000sqft of Class 1 cleanroom on 60″ deep and 45″ deep waffle slabs, 60MW substation, and 300mm-capable R&D lab facility for up to 60 tools. The center is comprised of two linked structures including a 3-story office support building, central utility building, parking structure and related site work development.